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MS7912 Pressure Sensor Die (0-12 bar)
 
Features
- 0 to 12 bar range (174 PSI)
- High linearity (0.05% typical)
- Absolute or differential
- Small Die size 1.72 x 1.58 mm
- High Reliability, Low Cost
Applications
- For absolute and differential pressure sensor systems
- Engine controls
- Diving computer
Description
The sensor element of the MS7912 consists of a silicon micro-machined membrane
with a Pyrex™ glass mounted under vacuum. Implanted resistors make use of the
piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed
vacuum reference cavity underneath the membrane whereas the differential sensor
(MS7912D) has a hole in the Pyrex™ glass at the backside of the sensor.
Datasheet
 ms7912.pdf Full datasheet in Acrobat PDF. (254 kB), Updated May 05,2005, V3
Application notes
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an401.pdf |
Analog Sensor Interfacing |
(116 kB), Updated Jan 31, 2003 |
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an402.pdf |
Sensor calibration for low cost barometers |
(191 kB), Updated Dec 17, 2002 |
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an508.pdf |
Mounting of pressure sensor dice |
(108 kB), Updated Feb 25, 2004 |
 Printable version
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