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MS7801 Pressure Sensor Die (0-1 bar)

Features
- 0 to 1 bar range (14.5 PSI)
- High linearity (0.05% typical)
- Absolute or Differential
- Small Die size 2.0 x 1.86 mm
- High Reliability, Low Cost
Applications
- For absolute and differential pressure sensor systems
- Barometers, Altimeters
- Variometers
Description
The sensor element of the MS7801 consists of a silicon micro-machined membrane
with a Pyrex™ glass mounted under vacuum. Implanted resistors make use of the
piezo-resistive effect. The absolute pressure sensor (MS7801A) carries a sealed
vacuum reference cavity underneath the membrane whereas the differential sensor
(MS7801D) has a hole in the Pyrex™ glass at the backside of the sensor.
Datasheet
ms7801.pdf Full datasheet in Acrobat PDF. (463 kB), Updated May 05,2005, V5
Application notes
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an401.pdf |
Analog Sensor Interfacing |
(116 kB), Updated Jan 31, 2003 |
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an402.pdf |
Sensor calibration for low cost barometers |
(191 kB), Updated Dec 17, 2002 |
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an508.pdf |
Mounting of pressure sensor dice |
(108 kB), Updated Feb 25, 2004 |
Printable version
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