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MS767 Pressure Sensor Die (0-7 bar)
 
Features
- 0 to 7 bar range (102 PSI)
- High sensitivity (392mV @ 5V)
- Absolute sensor
- Small Die size 1.62 x 1.48 mm
- High reliability, Low Cost
Applications
- High resolution absolute sensor systems
- Tire pressure measurements
- Electronic scales
Description
The sensor element of the MS767 consists of a silicon micro-machined
membrane with a Pyrex™ glass mounted under vacuum. Implanted resistors make
use of the piezo-resistive effect. The MS767 is available as an absolute
sensor (MS767A) where a sealed vacuum cavity underneath the membrane is
used as reference pressure.
Datasheet
 ms767.pdf Full datasheet in Acrobat PDF. (219 kB), Updated Feb 5, 2008, V8
Application notes
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an401.pdf |
Analog Sensor Interfacing |
(116 kB), Updated Jan 31, 2003 |
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an402.pdf |
Sensor calibration for low cost barometers |
(191 kB), Updated Dec 17, 2002 |
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an508.pdf |
Mounting of pressure sensor dice |
(108 kB), Updated Feb 25, 2004 |
 Printable version
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