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MS761 Pressure Sensor Die (0-1 bar)
 
Features
- 0 to 1 bar range (14.5 PSI)
- High sensitivity (240mV @ 5V)
- Absolute or Differential
- Small Die size 2.0 x 1.86 mm
- High Reliability, Low Cost
Applications
- High resolution absolute sensor systems
- Engine Control
- Barometers, Altimeters
- Variometers
Description
The sensor element of the MS761 consists of a silicon micro-machined membrane
with a Pyrex™ glass mounted under vacuum. Implanted resistors make use of the
piezo-resistive effect. The absolute pressure sensor (MS761A) carries a sealed
vacuum reference cavity underneath the membrane whereas the differential sensor
(MS761D) has a hole in the Pyrex™ glass at the backside of the sensor.
Datasheet
 ms761.pdf Full datasheet in Acrobat PDF. (244 kB), Updated May 9, 2007, V2
Application notes
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an401.pdf |
Analog Sensor Interfacing |
(116 kB), Updated Jan 31, 2003 |
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an402.pdf |
Sensor calibration for low cost barometers |
(191 kB), Updated Dec 17, 2002 |
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an508.pdf |
Mounting of pressure sensor dice |
(108 kB), Updated Feb 25, 2004 |
 Printable version
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