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MS7310D Pressure Sensor Die
(0-0.1 bar)
Features
- 0 to 100 mbar range (1.45 PSI)
- High linearity (typ. 0.35% @10kPa, 0.1% @2kPa)
- Differential sensor of 2.5 x 2.5 mm
- High Reliability, Low Cost
- Output Span of 110mV @5V
Applications
- Washing machines
- Level indicators
- Industrial control
- Leak detection
Description
The MS7310D pressure sensor die is designed for low pressure sensor systems with the highest demands on
resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a
Pyrex™ glass support. The sensor signal is proportional to the pressure difference between back and front side
of the membrane. The pressure is sensed by four implanted piezoresistors. The MS7310D exists in two
versions: the first one with the bond pads on one side only, the other one with some bond pads on the opposite
side.
Datasheet
 ms7310d.pdf Full datasheet in Acrobat PDF. (193 kB), Updated May 02, 2006, V4
Application notes
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an401.pdf |
Analog Sensor Interfacing |
(116 kB), Updated Jan 31, 2003 |
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an402.pdf |
Sensor calibration for low cost barometers |
(191 kB), Updated Dec 17, 2002 |
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an508.pdf |
Mounting of pressure sensor dice |
(108 kB), Updated Feb 25, 2004 |
 Printable version
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