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MS7212A Pressure Sensor Die (0-12 bar)
 
Features
- Media resistive pressure sensor die
- 0 to 12 bar range (174 PSI)
- High linearity (0.05% typical)
- Absolute sensor of 1.96 x 2.1 mm
- High Reliability
- Low Cost
Applications
- Harsh environments
- Absolute pressure sensor systems
- Braking systems
- Tire pressure
- Engine Control
- Diving Computers
Description
The MS7212A is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference
cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure,
applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To
improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™
and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.
Datasheet
 ms7212a.pdf Full datasheet in Acrobat PDF. (254 kB), Updated December 4, 2006, V3
Application notes
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an401.pdf |
Analog Sensor Interfacing |
(116 kB), Updated Jan 31, 2003 |
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an402.pdf |
Sensor calibration for low cost barometers |
(191 kB), Updated Dec 17, 2002 |
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an508.pdf |
Mounting of pressure sensor dice |
(108 kB), Updated Feb 25, 2004 |
 Printable version
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